PHOTOLITHOGRAPHY

Photolithography

Photolithography materials packaging, handling and management is an ATMI core capability. With strength of experience and proven performance, ATMI delivers top-of-the-line effective solutions for all of your photolithography material handling needs. From high-purity materials packaging to critical materials delivery systems and advanced materials tracking management technology, ATMI products and services are the choice for high performance solutions.

Using premium polyethylene plastic overpaks to provide a key safety feature, ATMI advanced packaging products come with a patented disposable internal liner and high-performance dip tubes, connectors and caps. In addition, ATMI products come equipped with mis-connect prevention features for each point of use, assuring low-risk of potentially costly errors.

Key products include the NOWPak™ brands of Bag-in-a-Bottle, Bag-in-a-Can and Bag-in-a Drum performance systems in a variety of sizes—all with a history of premium delivery performance.

Looking to the next generation in delivery systems, ATMI will soon release the innovative PDMPak™ line specifically for photo resist materials in a 4 Liter size. This product incorporates an efficient pressure-dispense technology that pushes resist into your application, minimizing the strain on pumps and reducing pump maintenance and downtime.

In another key industry first, ATMI has developed NOWTrak™, a patented RFID-based materials tracking and remote inventory management system. This system accurately tracks information on every materials package container in the fab, automating the task of getting critical data throughout the storage, staging and replenishment phases, including time in and out of cold storage as well as automated warning alerts impending change-out notifications and automated reporting.

Get quality performance, advanced tracking capabilities and materials utilization excellence with ATMI lithography packaging and management solutions.