ATMI is delivering breakthrough improvements in semiconductor manufacturing which enable continued device scaling and new material transitions that drive down costs. Discover how increased efficiencies can bring greater performance and meaningful value to your manufacturing operations.
ATMI AutoClean™ System
The first and only in-situ ion implant cleaning process delivering a more predictable process and extended source life.
ATMI SDS® Gas Sources
The safest technology in gas delivery systems. Ever.
ATMI RegenSi™ Silicon Process
Efficiency Solutions
Generate savings through more efficient and effective wafer reclaim technology
ATMI High Productivity Development
Knowledge rich research in a Fraction of the Time
ATMI CMPlicity™ System
Simplifying the CMP process. Coming soon...